良好な絶縁性を有する c 軸配向 PZT 系単結晶薄膜のSi 基板上への形成

Translated title of the contribution: Fabrication of c-Axis-oriented PZT-based monocrystalline thin film with high insulation property on Si substrate

Ryo Ebihara, Shinya Yoshida, Shuji Tanaka

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

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Engineering & Materials Science