A Development of Micro-Machined Micro Ion Source for Flexible and Concurrent MEMS Process

Tomoyuki Ueda, Shinya Tamonoki, Tatsuya Suzuki, Sumito Nagasawa, Hiroki Kuwano

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	41
Journal	Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010)
Publication status	Published - 2010 Jun 29

Cite this

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title = "A Development of Micro-Machined Micro Ion Source for Flexible and Concurrent MEMS Process",

author = "Tomoyuki Ueda and Shinya Tamonoki and Tatsuya Suzuki and Sumito Nagasawa and Hiroki Kuwano",

year = "2010",

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day = "29",

language = "English",

pages = "41",

journal = "Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010)",

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TY - JOUR

T1 - A Development of Micro-Machined Micro Ion Source for Flexible and Concurrent MEMS Process

AU - Ueda, Tomoyuki

AU - Tamonoki, Shinya

AU - Suzuki, Tatsuya

AU - Nagasawa, Sumito

AU - Kuwano, Hiroki

PY - 2010/6/29

Y1 - 2010/6/29

M3 - Article

SP - 41

JO - Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010)

JF - Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010)

ER -