A flexible micromachined planar spiral inductor for use as an artificial tactile mechanoreceptor

Nobuyuki Futai, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Contribution to journalArticlepeer-review

32 Citations (Scopus)


A micromachined planar spiral inductor was created for use as a passive mechanoreceptor element in a tactile sensor. Simulations and experiments were conducted to examine the change in inductance and the deformation in elements implanted in a silicone rubber medium. The results of both showed that the implanted reception inductors had a reception area specific to their direction. The experiments showed that when the inductors were embedded at a depth of 1 mm in a silicone rubber medium with a Young's modulus of 0.98 MPa, the practical minimal spacing between them was 2 mm, and the practical minimal displacement they could detect was 100 μm. Using a spectrum ranging from 0 to 130 MHz, up to eleven implanted inductors could be measured simultaneously. The fabricated reception inductors had high robustness, high sensitivity, and high repeatability. When several were serially connected using two electrical lines, one single frequency spectrum of the circuit could provide information from all of them.

Original languageEnglish
Pages (from-to)293-303
Number of pages11
JournalSensors and Actuators A: Physical
Issue number2-3
Publication statusPublished - 2004 Mar 15
Externally publishedYes


  • Artificial mechanoreceptor
  • Multipoint acquisition
  • Planar spiral inductor
  • Tactile sensor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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