A half-micron pitch Cu interconnection technology

K.Ueno K.Ueno, K.Ohto K.Ohto, K.Tsunenari K.Tsunenari, Kazuyoshi Ueno

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	27-28
Journal	1995 Symposium on VLSI Technology Digest of Technical Papers
Publication status	Published - 1996 Jun 1

Cite this

@article{6db3f9670e0b4e77a6b189769d375080,

title = "A half-micron pitch Cu interconnection technology",

author = "K.Ueno K.Ueno and K.Ohto K.Ohto and K.Tsunenari K.Tsunenari and Kazuyoshi Ueno",

year = "1996",

month = jun,

day = "1",

language = "English",

pages = "27--28",

journal = "1995 Symposium on VLSI Technology Digest of Technical Papers",

}