A New Trench Isolation Technology as A Replacement of LOCOS

H.Mikoshiba H.Mikoshiba, T.Homma T.Homma, K.Hamano K.Hamano, Tetsuya Homma

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	578-581
Journal	Proceedings of IEEE International Electron Devices Meeting
Publication status	Published - 1984 Dec 9

Cite this

@article{3584f1bcc2ea4687926343bff303dca2,

title = "A New Trench Isolation Technology as A Replacement of LOCOS",

author = "H.Mikoshiba H.Mikoshiba and T.Homma T.Homma and K.Hamano K.Hamano and Tetsuya Homma",

year = "1984",

month = dec,

day = "9",

language = "English",

pages = "578--581",

journal = "Proceedings of IEEE International Electron Devices Meeting",

}