A Novel Process for Emitter-Base-Collector Self-Aligned Heterojunction Bipolar Transistors Using a Pattern-Inversion Method

S.Tanaka S.Tanaka, S.Tanaka M.Madihian H.Toyoshima, K.Honjo K.Honjo, Shinichi Tanaka

Research output: Contribution to journal › Article › peer-review

Cite this

@article{bd11002da2d1441187997e85b39ea313,

title = "A Novel Process for Emitter-Base-Collector Self-Aligned Heterojunction Bipolar Transistors Using a Pattern-Inversion Method",

author = "S.Tanaka S.Tanaka and H.Toyoshima, {S.Tanaka M.Madihian} and K.Honjo K.Honjo and Shinichi Tanaka",

year = "1987",

month = may,

day = "1",

language = "English",

volume = "23",

pages = "562--564",

journal = "Electronics Letters",

issn = "0013-5194",

publisher = "Institution of Engineering and Technology",

}

TY - JOUR

T1 - A Novel Process for Emitter-Base-Collector Self-Aligned Heterojunction Bipolar Transistors Using a Pattern-Inversion Method

AU - S.Tanaka, S.Tanaka

AU - H.Toyoshima, S.Tanaka M.Madihian

AU - K.Honjo, K.Honjo

AU - Tanaka, Shinichi

PY - 1987/5/1

Y1 - 1987/5/1

M3 - Article

SN - 0013-5194

VL - 23

SP - 562

EP - 564

JO - Electronics Letters

JF - Electronics Letters

ER -