A process for Copper Films Deposition by Pyrolysis of Organic Copper Materials

T.Homma T.Homma, H.Kokubun H.Kokubun, A.Takasaki A.Takasaki, H.Machida H.Machida, M.Yamaguchi M.Yamaguchi, Tetsuya Homma

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Original language	English
Pages (from-to)	580-585
Journal	Journal of the Electrochemical Society
Volume	147
Publication status	Published - 2000 Feb 1

Cite this

@article{b5bb1777b0f34cd48931caf089f73e15,

title = "A process for Copper Films Deposition by Pyrolysis of Organic Copper Materials",

author = "T.Homma T.Homma and H.Kokubun H.Kokubun and A.Takasaki A.Takasaki and H.Machida H.Machida and M.Yamaguchi M.Yamaguchi and Tetsuya Homma",

year = "2000",

month = feb,

day = "1",

language = "English",

volume = "147",

pages = "580--585",

journal = "Journal of the Electrochemical Society",

issn = "0013-4651",

publisher = "Electrochemical Society, Inc.",

}

TY - JOUR

T1 - A process for Copper Films Deposition by Pyrolysis of Organic Copper Materials

AU - T.Homma, T.Homma

AU - H.Kokubun, H.Kokubun

AU - A.Takasaki, A.Takasaki

AU - H.Machida, H.Machida

AU - M.Yamaguchi, M.Yamaguchi

AU - Homma, Tetsuya

PY - 2000/2/1

Y1 - 2000/2/1

M3 - Article

SN - 0013-4651

VL - 147

SP - 580

EP - 585

JO - Journal of the Electrochemical Society

JF - Journal of the Electrochemical Society

ER -