A quarter-micron planarized interconnection technology with self-aligned plug

K.Ueno K.Ueno; K.Ohto K.Ohto; K.Tsunenari K.Tsunenari; K.Kajiyana K.Kajiyana; K.Kikuta K.Kikuta; T.Kikkawa T.Kikkawa; Kazuyoshi Ueno

A quarter-micron planarized interconnection technology with self-aligned plug

K.Ueno K.Ueno, K.Ohto K.Ohto, K.Tsunenari K.Tsunenari, K.Kajiyana K.Kajiyana, K.Kikuta K.Kikuta, T.Kikkawa T.Kikkawa, Kazuyoshi Ueno

Functional Control Systems

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	305-308
Journal	1992 IEDM Technical Digest
Publication status	Published - 1992 Dec 1

Cite this

@article{70b36614759942689b505ad866924119,

title = "A quarter-micron planarized interconnection technology with self-aligned plug",

author = "K.Ueno K.Ueno and K.Ohto K.Ohto and K.Tsunenari K.Tsunenari and K.Kajiyana K.Kajiyana and K.Kikuta K.Kikuta and T.Kikkawa T.Kikkawa and Kazuyoshi Ueno",

year = "1992",

month = dec,

day = "1",

language = "English",

pages = "305--308",

journal = "1992 IEDM Technical Digest",

}

TY - JOUR

T1 - A quarter-micron planarized interconnection technology with self-aligned plug

AU - K.Ueno, K.Ueno

AU - K.Ohto, K.Ohto

AU - K.Tsunenari, K.Tsunenari

AU - K.Kajiyana, K.Kajiyana

AU - K.Kikuta, K.Kikuta

AU - T.Kikkawa, T.Kikkawa

AU - Ueno, Kazuyoshi

PY - 1992/12/1

Y1 - 1992/12/1

M3 - Article

SP - 305

EP - 308

JO - 1992 IEDM Technical Digest

JF - 1992 IEDM Technical Digest

ER -