Abstract
We developed a surface acoustic wave (SAW) atomizer, which can produce a narrow mist spray of submillimeter width. The atomized mist spray converges spontaneously and thus requires no additional spray converging system. Key features in achieving the self-converging atomization are two-port interdigital transducers (IDTs) with a groove in between. The SAW is driven by applying an electric field on IDTs patterned on a piezoelectric substrate. The two-port IDTs drive SAWs in opposite directions toward the groove, which then separates the SAW-driven streaming on each side of the groove. Two types of self-converging atomizer were experimentally demonstrated, a line and a point atomizer. While the former uses parallel IDTs to atomize water from the groove into a thin-planar-shaped spray, the latter uses arc-shaped SAW lenses to focus the SAW into a certain point in the groove to atomize water into a narrow point spray. In addition, by adding a water reservoir, continuous operation of up to 30 s was achieved with the submillimeter narrow point atomizer.
Original language | English |
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Pages (from-to) | 701-710 |
Number of pages | 10 |
Journal | Microfluidics and Nanofluidics |
Volume | 17 |
Issue number | 4 |
DOIs | |
Publication status | Published - 2014 Oct |
Externally published | Yes |
Keywords
- Atomizer
- MEMS
- Microfluidics
- SAW
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Materials Chemistry