A Statistical Process Control Method for Semiconductor Manufacturing

Tomoaki Kubo, Tomomi Ino, Masateru Minami, Tetsuya Homma

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	246-254
Journal	SICE Journal of Control and Measurement System Integration
Volume	2
Publication status	Published - 2009 Aug 3

Cite this

@article{26904b2c605e4377a2f5b27a65fc9aca,

title = "A Statistical Process Control Method for Semiconductor Manufacturing",

author = "Tomoaki Kubo and Tomomi Ino and Masateru Minami and Tetsuya Homma",

year = "2009",

month = aug,

day = "3",

language = "English",

volume = "2",

pages = "246--254",

journal = "SICE Journal of Control and Measurement System Integration",

}