TY - GEN
T1 - Adaptive control for piezo-actuated nano-positioner
AU - Chen, Xinkai
PY - 2009
Y1 - 2009
N2 - The piezo-actuated nano-positioner is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction behavior in the PM, the accurate position control of the piezo-actuated stage is a challenging task. This paper discusses the adaptive sliding mode control for the piezo-actuated nano-positioner, where the hysteresis is described by Prandtl-Ishlinskii model. This paper tries to fuse the hysteresis model with the adaptive control techniques, where the real value of the parameters of the stage need neither to be identified nor to be measured. The proposed control law ensures the global stability of the controlled nanopositioner, and the position error can be controlled to be as small as required by choosing the design parameters. Experimental results show the effectiveness of the proposed method.
AB - The piezo-actuated nano-positioner is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction behavior in the PM, the accurate position control of the piezo-actuated stage is a challenging task. This paper discusses the adaptive sliding mode control for the piezo-actuated nano-positioner, where the hysteresis is described by Prandtl-Ishlinskii model. This paper tries to fuse the hysteresis model with the adaptive control techniques, where the real value of the parameters of the stage need neither to be identified nor to be measured. The proposed control law ensures the global stability of the controlled nanopositioner, and the position error can be controlled to be as small as required by choosing the design parameters. Experimental results show the effectiveness of the proposed method.
UR - http://www.scopus.com/inward/record.url?scp=80051609183&partnerID=8YFLogxK
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U2 - 10.3182/20090706-3-FR-2004.0366
DO - 10.3182/20090706-3-FR-2004.0366
M3 - Conference contribution
AN - SCOPUS:80051609183
SN - 9783902661470
T3 - IFAC Proceedings Volumes (IFAC-PapersOnline)
SP - 1744
EP - 1749
BT - 15th Symposium on System Identification, SYSID 2009 - Preprints
T2 - 15th IFAC Symposium on System Identification, SYSID 2009
Y2 - 6 July 2009 through 8 July 2009
ER -