Adaptive control for piezo-actuated XY-table

Xinkai Chen; Makoto Hattori

doi:10.1109/ICMA.2011.5986303

Adaptive control for piezo-actuated XY-table

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

Original language	English
Title of host publication	2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011
Pages	2089-2094
Number of pages	6
DOIs	https://doi.org/10.1109/ICMA.2011.5986303
Publication status	Published - 2011 Nov 17
Event	2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011 - Beijing, China Duration: 2011 Aug 7 → 2011 Aug 10

Publication series

Name	2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011

Conference

Conference	2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011
Country/Territory	China
City	Beijing
Period	11/8/7 → 11/8/10

Keywords

XY-table
high precision control
hysteresis
piezo electric actuators

ASJC Scopus subject areas

Artificial Intelligence
Electrical and Electronic Engineering
Mechanical Engineering

Access to Document

10.1109/ICMA.2011.5986303

Cite this

Chen, X & Hattori, M 2011, Adaptive control for piezo-actuated XY-table. in 2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011., 5986303, 2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011, pp. 2089-2094, 2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011, Beijing, China, 11/8/7. https://doi.org/10.1109/ICMA.2011.5986303

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title = "Adaptive control for piezo-actuated XY-table",

abstract = "The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.",

keywords = "XY-table, high precision control, hysteresis, piezo electric actuators",

author = "Xinkai Chen and Makoto Hattori",

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AU - Hattori, Makoto

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N2 - The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

AB - The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

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KW - high precision control

KW - hysteresis

KW - piezo electric actuators

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Adaptive control for piezo-actuated XY-table

Abstract

Publication series

Conference

Keywords

ASJC Scopus subject areas

Access to Document

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