Advanced adaptive control for piezo-actuated nano-positioner

Xinkai Chen; Chun Yi Su; Toshio Fukuda

doi:10.1109/IECON.2011.6119849

Advanced adaptive control for piezo-actuated nano-positioner

Xinkai Chen, Chun Yi Su, Toshio Fukuda

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

The piezo-actuated nano-positioner is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control of the piezo-actuated nano-positioner is a very challenging task. In this paper, a new adaptive control law for the positioner is proposed, where the parameterized hysteresis model is employed. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. The advantage is that the real values of the parameters of the positioner need to be neither identified nor measured, and very high precision tracking can be achieved. Experimental results show the effectiveness of the proposed method.

Original language	English
Title of host publication	Proceedings
Subtitle of host publication	IECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society
Pages	3346-3351
Number of pages	6
DOIs	https://doi.org/10.1109/IECON.2011.6119849
Publication status	Published - 2011
Event	37th Annual Conference of the IEEE Industrial Electronics Society, IECON 2011 - Melbourne, VIC, Australia Duration: 2011 Nov 7 → 2011 Nov 10

Publication series

Name	IECON Proceedings (Industrial Electronics Conference)

Conference

Conference	37th Annual Conference of the IEEE Industrial Electronics Society, IECON 2011
Country/Territory	Australia
City	Melbourne, VIC
Period	11/11/7 → 11/11/10

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/IECON.2011.6119849

Cite this

Advanced adaptive control for piezo-actuated nano-positioner. / Chen, Xinkai; Su, Chun Yi; Fukuda, Toshio.
Proceedings: IECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society. 2011. p. 3346-3351 6119849 (IECON Proceedings (Industrial Electronics Conference)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Chen, X, Su, CY & Fukuda, T 2011, Advanced adaptive control for piezo-actuated nano-positioner. in Proceedings: IECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society., 6119849, IECON Proceedings (Industrial Electronics Conference), pp. 3346-3351, 37th Annual Conference of the IEEE Industrial Electronics Society, IECON 2011, Melbourne, VIC, Australia, 11/11/7. https://doi.org/10.1109/IECON.2011.6119849

@inproceedings{318ff79724454dd78f0c05ac8837b44b,

title = "Advanced adaptive control for piezo-actuated nano-positioner",

abstract = "The piezo-actuated nano-positioner is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control of the piezo-actuated nano-positioner is a very challenging task. In this paper, a new adaptive control law for the positioner is proposed, where the parameterized hysteresis model is employed. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. The advantage is that the real values of the parameters of the positioner need to be neither identified nor measured, and very high precision tracking can be achieved. Experimental results show the effectiveness of the proposed method.",

author = "Xinkai Chen and Su, {Chun Yi} and Toshio Fukuda",

year = "2011",

doi = "10.1109/IECON.2011.6119849",

language = "English",

isbn = "9781612849720",

series = "IECON Proceedings (Industrial Electronics Conference)",

pages = "3346--3351",

booktitle = "Proceedings",

note = "37th Annual Conference of the IEEE Industrial Electronics Society, IECON 2011 ; Conference date: 07-11-2011 Through 10-11-2011",

}

TY - GEN

T1 - Advanced adaptive control for piezo-actuated nano-positioner

AU - Chen, Xinkai

AU - Su, Chun Yi

AU - Fukuda, Toshio

PY - 2011

Y1 - 2011

N2 - The piezo-actuated nano-positioner is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control of the piezo-actuated nano-positioner is a very challenging task. In this paper, a new adaptive control law for the positioner is proposed, where the parameterized hysteresis model is employed. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. The advantage is that the real values of the parameters of the positioner need to be neither identified nor measured, and very high precision tracking can be achieved. Experimental results show the effectiveness of the proposed method.

AB - The piezo-actuated nano-positioner is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control of the piezo-actuated nano-positioner is a very challenging task. In this paper, a new adaptive control law for the positioner is proposed, where the parameterized hysteresis model is employed. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. The advantage is that the real values of the parameters of the positioner need to be neither identified nor measured, and very high precision tracking can be achieved. Experimental results show the effectiveness of the proposed method.

UR - http://www.scopus.com/inward/record.url?scp=84863069624&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84863069624&partnerID=8YFLogxK

U2 - 10.1109/IECON.2011.6119849

DO - 10.1109/IECON.2011.6119849

M3 - Conference contribution

AN - SCOPUS:84863069624

SN - 9781612849720

T3 - IECON Proceedings (Industrial Electronics Conference)

SP - 3346

EP - 3351

BT - Proceedings

T2 - 37th Annual Conference of the IEEE Industrial Electronics Society, IECON 2011

Y2 - 7 November 2011 through 10 November 2011

ER -

Advanced adaptive control for piezo-actuated nano-positioner

Abstract

Publication series

Conference

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this