Advanced high precision control for XY-table

Xinkai Chen

doi:10.1007/978-3-642-33509-9_2

Advanced high precision control for XY-table

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

Original language	English
Title of host publication	Intelligent Robotics and Applications - 5th International Conference, ICIRA 2012, Proceedings
Pages	11-21
Number of pages	11
Edition	PART 1
DOIs	https://doi.org/10.1007/978-3-642-33509-9_2
Publication status	Published - 2012 Dec 1
Event	5th International Conference on Intelligent Robotics and Applications, ICIRA 2012 - Montreal, QC, Canada Duration: 2012 Oct 3 → 2012 Oct 5

Publication series

Name	Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)
Number	PART 1
Volume	7506 LNAI
ISSN (Print)	0302-9743
ISSN (Electronic)	1611-3349

Conference

Conference	5th International Conference on Intelligent Robotics and Applications, ICIRA 2012
Country/Territory	Canada
City	Montreal, QC
Period	12/10/3 → 12/10/5

Keywords

Adaptive control
Hysteresis
Piezo electric actuators
XY-table

ASJC Scopus subject areas

Theoretical Computer Science
Computer Science(all)

Access to Document

10.1007/978-3-642-33509-9_2

Cite this

Chen, X. (2012). Advanced high precision control for XY-table. In Intelligent Robotics and Applications - 5th International Conference, ICIRA 2012, Proceedings (PART 1 ed., pp. 11-21). (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); Vol. 7506 LNAI, No. PART 1). https://doi.org/10.1007/978-3-642-33509-9_2

Advanced high precision control for XY-table. / Chen, Xinkai.
Intelligent Robotics and Applications - 5th International Conference, ICIRA 2012, Proceedings. PART 1. ed. 2012. p. 11-21 (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); Vol. 7506 LNAI, No. PART 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Chen, X 2012, Advanced high precision control for XY-table. in Intelligent Robotics and Applications - 5th International Conference, ICIRA 2012, Proceedings. PART 1 edn, Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics), no. PART 1, vol. 7506 LNAI, pp. 11-21, 5th International Conference on Intelligent Robotics and Applications, ICIRA 2012, Montreal, QC, Canada, 12/10/3. https://doi.org/10.1007/978-3-642-33509-9_2

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Advanced high precision control for XY-table

Abstract

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Conference

Keywords

ASJC Scopus subject areas

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