Advanced Metallization for ULSI Applications

Osamu Nakatsuka, Hoo Jeong Lee, Young Bae Park, Kazuyoshi Ueno, Shinji Yokogawa

Research output: Contribution to journal › Editorial › peer-review

Original language	English
Article number	06J001
Journal	Japanese Journal of Applied Physics
Volume	55
Issue number	63
DOIs	https://doi.org/10.7567/JJAP.55.06J001
Publication status	Published - 2016

ASJC Scopus subject areas

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title = "Advanced Metallization for ULSI Applications",

author = "Osamu Nakatsuka and Lee, {Hoo Jeong} and Park, {Young Bae} and Kazuyoshi Ueno and Shinji Yokogawa",

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language = "English",

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AU - Nakatsuka, Osamu

AU - Lee, Hoo Jeong

AU - Park, Young Bae

AU - Ueno, Kazuyoshi

AU - Yokogawa, Shinji

PY - 2016

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JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

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