AlN thin film growth using electron cyclotron resonance reactive sputtering

N. H. Hung, H. Oguchi, H. Kuwano

Research output: Contribution to journalConference articlepeer-review

2 Citations (Scopus)


In this report, we investigated conditions to deposit stoichiometric aluminium nitride (AlN) thin films grown on (100)-oriented Si substrates under various Ar/N2 gas flow rates at a wide range of temperature from room temperature (RT) to 350°C using electron cyclotron resonance (ECR) reactive sputtering. This study revealed that stoichiometric of thin film can be controlled by N2/Ar flow rate and that stoichiometric N/Al 1 was archived at N2/Ar 2. This study also revealed that crystallinity can be controlled by substrate temperature. From RT to 200°C, thin films were amorphous or poly-crystal, at 350°C however, thin film was mainly [110] and [100] AlN. Obtained thin films are densely packed and have very low root mean square (RMS) roughness of 0.41 nm which is much less than other sputtering methods.

Original languageEnglish
Article number012047
JournalJournal of Physics: Conference Series
Issue number1
Publication statusPublished - 2014
Externally publishedYes
Event14th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications, PowerMEMS 2014 - Awaji Island, Hyogo, Japan
Duration: 2014 Nov 182014 Nov 21

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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