An Outlier Removal Method for SPC in Semiconductor Manufactureing

Tomoaki Kubo, Masateru Minami, Tetsuya Homma

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	292-298
Journal	SICE Journal of Control and Measurement System Integration
Volume	3
Publication status	Published - 2010 Oct 5

Cite this

@article{a933fcba7d12439b9a0256ff6bbaba3b,

title = "An Outlier Removal Method for SPC in Semiconductor Manufactureing",

author = "Tomoaki Kubo and Masateru Minami and Tetsuya Homma",

year = "2010",

month = oct,

day = "5",

language = "English",

volume = "3",

pages = "292--298",

journal = "SICE Journal of Control and Measurement System Integration",

}