An Outlier Removal Method for SPC in Semiconductor Manufacturing

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	292-298
Journal	The Society of Instrument and Control Engineers (SICE) Journal of Control, Measurement, and System Integration
Volume	3
Publication status	Published - 2010 Jul 31

Cite this

@article{8a4a802ea0c049fa8fbdd3dd6e82f122,

title = "An Outlier Removal Method for SPC in Semiconductor Manufacturing",

author = "T. Kubo and Homma, {T. Kubo;M.Minami;T.}",

year = "2010",

month = jul,

day = "31",

language = "English",

volume = "3",

pages = "292--298",

journal = "The Society of Instrument and Control Engineers (SICE) Journal of Control, Measurement, and System Integration",

}

TY - JOUR

T1 - An Outlier Removal Method for SPC in Semiconductor Manufacturing

AU - Kubo, T.

AU - Homma, T. Kubo;M.Minami;T.

PY - 2010/7/31

Y1 - 2010/7/31

M3 - Article

VL - 3

SP - 292

EP - 298

JO - The Society of Instrument and Control Engineers (SICE) Journal of Control, Measurement, and System Integration

JF - The Society of Instrument and Control Engineers (SICE) Journal of Control, Measurement, and System Integration

ER -