Applications of a microlens array and a photomask to the laser microfabrication of a periodic photopolymer rod array

Shigeki Matsuo; Takashi Miyamoto; Takuro Tomita; Shuichi Hashimoto

doi:10.1364/AO.46.008264

Applications of a microlens array and a photomask to the laser microfabrication of a periodic photopolymer rod array

Shigeki Matsuo, Takashi Miyamoto, Takuro Tomita, Shuichi Hashimoto

Research output: Contribution to journal › Article › peer-review

19 Citations (Scopus)

Abstract

We report the simultaneous multipoint fabrication of polymer rods by the femtosecond laser processing of a negative photoresist using a microlens array (MLA). The rods were periodically arranged in the form of an array corresponding to the MLA and free-standing on a glass substrate. The use of a photomask enabled us to define the contour of the rod array. Furthermore, sample translation techniques were demonstrated for the effective fabrication of large-area structures.

Original language	English
Pages (from-to)	8264-8267
Number of pages	4
Journal	Applied Optics
Volume	46
Issue number	34
DOIs	https://doi.org/10.1364/AO.46.008264
Publication status	Published - 2007 Dec 1
Externally published	Yes

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Engineering (miscellaneous)
Electrical and Electronic Engineering

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10.1364/AO.46.008264

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abstract = "We report the simultaneous multipoint fabrication of polymer rods by the femtosecond laser processing of a negative photoresist using a microlens array (MLA). The rods were periodically arranged in the form of an array corresponding to the MLA and free-standing on a glass substrate. The use of a photomask enabled us to define the contour of the rod array. Furthermore, sample translation techniques were demonstrated for the effective fabrication of large-area structures.",

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AU - Hashimoto, Shuichi

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AB - We report the simultaneous multipoint fabrication of polymer rods by the femtosecond laser processing of a negative photoresist using a microlens array (MLA). The rods were periodically arranged in the form of an array corresponding to the MLA and free-standing on a glass substrate. The use of a photomask enabled us to define the contour of the rod array. Furthermore, sample translation techniques were demonstrated for the effective fabrication of large-area structures.

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Applications of a microlens array and a photomask to the laser microfabrication of a periodic photopolymer rod array

Abstract

ASJC Scopus subject areas

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