Applications of microstructures fabricated by proton beam writing to electric-micro filters

Yusuke Furuta, Hiroyuki Nishikawa, Takahiro Satoh, Yasuyuki Ishii, Tomihiro Kamiya, Ryota Nakao, Satoshi Uchida

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17 Citations (Scopus)


Fabrication of high-aspect-ratio microstructures was performed by proton beam writing (PBW) using a microbeam line at Takasaki Ion Accelerators for Advanced Radiation Application (TIARA), JAEA Takasaki, JAPAN. As one of the applications of the high-aspect-ratio structures micro-machined by PBW, we utilized the high-aspect pillars for electric-micro filters of microbes such as Escherichia coli and Yeast based on the dielectrophoretic force. The filter is equipped with high-aspect pillars with a height of ∼20 μm and a diameter of ∼1 μm on a glass plate. Evaluation of the dielectrophoresis (DEP) device for capturing E. coli and Yeast was made using either observation by optical microscope or photoluminescence (PL) measurements.

Original languageEnglish
Pages (from-to)2285-2288
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Issue number12-13
Publication statusPublished - 2009 Jun 15


  • Electric-micro filter
  • High-aspect-ratio microstructure
  • Proton beam writing
  • SU-8

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation


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