Bath-life extension of iridium electroplating by separating anode and cathode compartments with ion-exchange membrane

Takashi Ohsaka; Katsuhiko Hirano; Shin Ichiro Imabayashi

doi:10.1149/1.3432336

Bath-life extension of iridium electroplating by separating anode and cathode compartments with ion-exchange membrane

Takashi Ohsaka, Katsuhiko Hirano, Shin Ichiro Imabayashi

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

The present study examined how to minimize the influence of the anodic reaction products by using an ion-exchange membrane to separate the cathode and anode compartments and by changing the anode electrolyte composition. The current efficiency is maintained at 100% for more than 6 times longer period compared to the conventional plating method using a one-compartment cell. The present iridium plating is also superior in crack formation. The addition of glycerol is effective in reducing the crack formation not only in freshly prepared plating baths but also in plating baths used for long periods.

Original language	English
Pages (from-to)	D65-D68
Journal	Electrochemical and Solid-State Letters
Volume	13
Issue number	8
DOIs	https://doi.org/10.1149/1.3432336
Publication status	Published - 2010 Jun 21

ASJC Scopus subject areas

Chemical Engineering(all)
Materials Science(all)
Physical and Theoretical Chemistry
Electrochemistry
Electrical and Electronic Engineering

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Bath-life extension of iridium electroplating by separating anode and cathode compartments with ion-exchange membrane

Abstract

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