TY - GEN
T1 - Characterization of Epitaxial-PZT/SI Piezoelectric Micromachined Ultrasonic Transducer (PMUT) and its Phased Array System
AU - Liu, Ziyi
AU - Yoshida, Shinya
AU - Horie, Toshiaki
AU - Okamoto, Shoji
AU - Takayama, Ryouichi
AU - Tanaka, Shuji
N1 - Publisher Copyright:
© 2019 IEEE.
PY - 2019/6
Y1 - 2019/6
N2 - In this study, we have demonstrated the usability of an epitaxial lead zirconate titanate (Epi-PZT) thin film for a piezoelectric micromachined ultrasonic transducer (pMUT) imager. At first, transmitting abilities and receiving sensitivities of the single-element pMUT based on Epi PZT and polycrystalline PZT (Poly-PZT) were evaluated as a fundamental study. Then, the 8-ch linear array system driven by a commercially-available pulser board was built, and successfully formed a focused ultrasonic beam. Finally, we obtained the ultrasonic images of a polydimethylsiloxane-based phantom by using the Epi-PZT and Poly-PZT pMUT linear array, and experimentally proved that Epi-PZT pMUT array can obtain higher contrast image compared to Poly-PZT device.
AB - In this study, we have demonstrated the usability of an epitaxial lead zirconate titanate (Epi-PZT) thin film for a piezoelectric micromachined ultrasonic transducer (pMUT) imager. At first, transmitting abilities and receiving sensitivities of the single-element pMUT based on Epi PZT and polycrystalline PZT (Poly-PZT) were evaluated as a fundamental study. Then, the 8-ch linear array system driven by a commercially-available pulser board was built, and successfully formed a focused ultrasonic beam. Finally, we obtained the ultrasonic images of a polydimethylsiloxane-based phantom by using the Epi-PZT and Poly-PZT pMUT linear array, and experimentally proved that Epi-PZT pMUT array can obtain higher contrast image compared to Poly-PZT device.
KW - beamforming
KW - epitaxial PZT
KW - pMUT
KW - ultrasound image
UR - http://www.scopus.com/inward/record.url?scp=85071950303&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85071950303&partnerID=8YFLogxK
U2 - 10.1109/TRANSDUCERS.2019.8808425
DO - 10.1109/TRANSDUCERS.2019.8808425
M3 - Conference contribution
AN - SCOPUS:85071950303
T3 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
SP - 246
EP - 249
BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Y2 - 23 June 2019 through 27 June 2019
ER -