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Characterization of Epitaxial-PZT/SI Piezoelectric Micromachined Ultrasonic Transducer (PMUT) and its Phased Array System
Ziyi Liu, Shinya Yoshida, Toshiaki Horie, Shoji Okamoto, Ryouichi Takayama, Shuji Tanaka
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
14
Citations
(Scopus)