TY - JOUR
T1 - Characterization of ion-implanted silica glass by micro-photoluminescence and Raman spectroscopy
AU - Souno, T.
AU - Nishikawa, H.
AU - Hattori, M.
AU - Ohki, Y.
AU - Watanabe, E.
AU - Oikawa, M.
AU - Kamiya, T.
AU - Arakawa, K.
N1 - Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2003/9
Y1 - 2003/9
N2 - We evaluated structural changes in silica glass induced by ion microbeam using microscopic photoluminescence (PL) and Raman scattering measurements. Microbeams (1.7 MeV H+) were scanned over the sharp right-edges of the silica substrates with a fluence of 1 × 1017 cm -2, then two PL bands of silica at 540 and 650 nm were observed at the irradiated region. The PL bands show different lateral and depth distributions. The distribution of the 540 nm PL is in good agreement with that of the refractive index changed region. The lateral distribution of the 650 nm band is broader by 1.5 times than those of the 540 nm PL and the refractive index changed region. The microscopic Raman scattering measurements show an increased intensity of 606 cm-1 peak associated with compaction at the microbeam irradiated regions.
AB - We evaluated structural changes in silica glass induced by ion microbeam using microscopic photoluminescence (PL) and Raman scattering measurements. Microbeams (1.7 MeV H+) were scanned over the sharp right-edges of the silica substrates with a fluence of 1 × 1017 cm -2, then two PL bands of silica at 540 and 650 nm were observed at the irradiated region. The PL bands show different lateral and depth distributions. The distribution of the 540 nm PL is in good agreement with that of the refractive index changed region. The lateral distribution of the 650 nm band is broader by 1.5 times than those of the 540 nm PL and the refractive index changed region. The microscopic Raman scattering measurements show an increased intensity of 606 cm-1 peak associated with compaction at the microbeam irradiated regions.
KW - Ion microbeam
KW - Photoluminescence
KW - Raman scattering
KW - Silica
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U2 - 10.1016/S0168-583X(03)01032-2
DO - 10.1016/S0168-583X(03)01032-2
M3 - Conference article
AN - SCOPUS:0043014863
SN - 0168-583X
VL - 210
SP - 277
EP - 280
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
T2 - 8th International Conference on Nuclear Microprobe Technology
Y2 - 8 September 2002 through 13 September 2002
ER -