Characterization of refractive index changes of silica glass induced by ion microbeam

M. Hattori, Y. Ohki, M. Fujimaki, T. Souno, H. Nishikawa, E. Watanabe, M. Oikawa, T. Kamiya, K. Arakawa

Research output: Contribution to journalConference articlepeer-review

7 Citations (Scopus)


Distributions of structural and refractive index changes of silica irradiated by H+ microbeam were studied by optical and atomic force microscopes (AFM). The AFM measurements on the microbeam irradiated area show the formation of a groove on the surface. In addition, a cross sectional observation on the surface parallel to the incident plane reveals surface deformation along the ion tracks, which is deepest at the projected range of ions. Taking into account the possible structural changes of silica induced by energy deposition calculated by TRIM, the measured topological changes at the front and side surfaces result from internal compaction of silica glass. Refractive index changes were estimated from the Lorentz-Lorenz relationship using the distribution of the internal compaction estimated by the AFM measurements.

Original languageEnglish
Pages (from-to)272-276
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Publication statusPublished - 2003 Sept
Event8th International Conference on Nuclear Microprobe Technology - Takasaki, Japan
Duration: 2002 Sept 82002 Sept 13


  • Atomic force microscope
  • Compaction
  • Ion microbeam
  • Refractive index change
  • Silica glass

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation


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