Original language | English |
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Pages (from-to) | 1962-1970 |
Journal | Materials Transactions. |
Volume | 44 [10] (2003) |
Publication status | Published - 1800 |
Chemical modification of titanium nitride films via ion implantation.
T. Aizawa, A.Mitsuo A.Mitsuo, T. Akhadejdamrong
Research output: Contribution to journal › Article › peer-review