Chemical modification of titanium nitride films via ion implantation.

T. Aizawa, A.Mitsuo A.Mitsuo, T. Akhadejdamrong

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)1962-1970
JournalMaterials Transactions.
Volume44 [10] (2003)
Publication statusPublished - 1800

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