Fingerprint
Dive into the research topics of 'Cleaning of CHF3 plasma-etched SiO2/SiN/Cu via structures with dilute hydrofluoric acid solutions'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Cleaning of CHF3 plasma-etched SiO2/SiN/Cu via structures with dilute hydrofluoric acid solutions
Kazuyoshi Ueno, Vincent M. Donnelly, Takamaro Kikkawa
Research output: Contribution to journal › Article › peer-review
13
Citations
(Scopus)