Coatings and microstructures of monolithic TiB2 films and double layer and composite TiCN/TiB2 films from alkoxide solutions by thermal plasma CVD

Shimada Shimada, S S, S. S., Takahashi Takahashi, M. M., Kiyono Kiyono, H. H., Tsujino Tsujino, J. J.

Research output: Contribution to journalArticlepeer-review

20 Citations (Scopus)
Original languageEnglish
Pages (from-to)6616-6621
JournalThin Solid Films
Publication statusPublished - 2008 Jan 1

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