Current status of copper multilevel interconnects (Invited)

K.Ueno K.Ueno; M.Iguchi M.Iguchi; T.Yokoyama T.Yokoyama; N.Oda N.Oda; H.Miyamoto H.Miyamoto; Y.Matsubara Y.Matsubara; T.Horiuchi T.Horiuchi; S.Saito S.Saito; Kazuyoshi Ueno

Current status of copper multilevel interconnects (Invited)

K.Ueno K.Ueno, M.Iguchi M.Iguchi, T.Yokoyama T.Yokoyama, N.Oda N.Oda, H.Miyamoto H.Miyamoto, Y.Matsubara Y.Matsubara, T.Horiuchi T.Horiuchi, S.Saito S.Saito, Kazuyoshi Ueno

Functional Control Systems

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1-8
Journal	Proceedings of 1st International Conference on Semiconductor Technology
Volume	2
Publication status	Published - 2001 Mar 1

Cite this

@article{3de23c7886ef415bb8876ebb1ec75b27,

title = "Current status of copper multilevel interconnects (Invited)",

author = "K.Ueno K.Ueno and M.Iguchi M.Iguchi and T.Yokoyama T.Yokoyama and N.Oda N.Oda and H.Miyamoto H.Miyamoto and Y.Matsubara Y.Matsubara and T.Horiuchi T.Horiuchi and S.Saito S.Saito and Kazuyoshi Ueno",

year = "2001",

month = mar,

day = "1",

language = "English",

volume = "2",

pages = "1--8",

journal = "Proceedings of 1st International Conference on Semiconductor Technology",

}

TY - JOUR

T1 - Current status of copper multilevel interconnects (Invited)

AU - K.Ueno, K.Ueno

AU - M.Iguchi, M.Iguchi

AU - T.Yokoyama, T.Yokoyama

AU - N.Oda, N.Oda

AU - H.Miyamoto, H.Miyamoto

AU - Y.Matsubara, Y.Matsubara

AU - T.Horiuchi, T.Horiuchi

AU - S.Saito, S.Saito

AU - Ueno, Kazuyoshi

PY - 2001/3/1

Y1 - 2001/3/1

M3 - Article

VL - 2

SP - 1

EP - 8

JO - Proceedings of 1st International Conference on Semiconductor Technology

JF - Proceedings of 1st International Conference on Semiconductor Technology

ER -