@inproceedings{16a2080848194de4bb3588b48c003999,
title = "Degradation of electromigration lifetime by post-annealing for CU/Low-k interconnects",
author = "Y. Kakuhara and K. Ueno",
year = "2005",
month = dec,
day = "15",
language = "English",
isbn = "0780388038",
series = "IEEE International Reliability Physics Symposium Proceedings",
pages = "656--657",
booktitle = "2005 IEEE International Reliability Physics Symposium Proceedings, 43rd Annual",
note = "2005 IEEE International Reliability Physics Symposium Proceedings, 43rd Annual ; Conference date: 17-04-2005 Through 21-04-2005",
}