Detection of deposition rate of plasma-polymerized films with a quartz crystal microbalance

The deposition rates of plasma-polymerized (pp-) films of vinyl acetate, vinyl trifluoroacetate, vinyl 2-chloroacetate, vinyl butanoate, vinyl pivalate, vinyl 2-butenoate, vinyl hexanoate and styrene are determined by the quartz crystal microbalance. Using the same polymerization conditions (100 W RF and 100 Pa vapor pressure) for the various monomers, the deposition rates were determined to be constant within the interval measured. The deposition rates of pp-vinyl acetate, pp-vinyl trifluoroacetate, pp-vinyl 2-chloroacetate, pp-vinyl butanoate, pp-vinyl pivalate, pp-vinyl 2-butenoate, vinyl hexanoate and pp-styrene were scattered on the different position of measure on the position of the lower electrode in the plasma polymerization equipment. The average deposition rate of pp-vinyl acetate was 0.28 μg/min. The average deposition rate of pp-vinyl trifluoroacetate was higher by 15 times, and that of pp- vinyl 2-chloroacetate was higher by 23 times than that of pp-vinyl acetate. The average deposition rate depended on the chemical structure of the monomer.