Development of a stage-scanning system for high-resolution confocal STEM

Masaki Takeguchi; Ayako Hashimoto; Masayuki Shimojo; Kazutaka Mitsuishi; Kazuo Furuya

doi:10.1093/jmicro/dfn010

Development of a stage-scanning system for high-resolution confocal STEM

Masaki Takeguchi, Ayako Hashimoto, Masayuki Shimojo, Kazutaka Mitsuishi, Kazuo Furuya

Research output: Contribution to journal › Article › peer-review

50 Citations (Scopus)

Abstract

A stage-scanning system is composed of a specially designed transmission electron microscopy specimen holder equipped with a piezo-driven specimen stage, power supplier and control software. This system enables the specimen to be scanned three-dimensionally, and therefore confocal scanning transmission electron microscopy (STEM) can be performed with a fixed electron-optics configuration. It is demonstrated that stage-scanning confocal STEM images can be obtained with the lateral atomic resolution and the specimen can be moved three-dimensionally with high precision.

Original language	English
Pages (from-to)	123-127
Number of pages	5
Journal	Journal of Electron Microscopy
Volume	57
Issue number	4
DOIs	https://doi.org/10.1093/jmicro/dfn010
Publication status	Published - 2008 Aug 1
Externally published	Yes

Keywords

Confocal scanning transmission electron microscopy
Optical sectioning
Piezo actuators
Pinhole
Stage-scanning system
Three-dimensional scanning

ASJC Scopus subject areas

Instrumentation

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10.1093/jmicro/dfn010

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abstract = "A stage-scanning system is composed of a specially designed transmission electron microscopy specimen holder equipped with a piezo-driven specimen stage, power supplier and control software. This system enables the specimen to be scanned three-dimensionally, and therefore confocal scanning transmission electron microscopy (STEM) can be performed with a fixed electron-optics configuration. It is demonstrated that stage-scanning confocal STEM images can be obtained with the lateral atomic resolution and the specimen can be moved three-dimensionally with high precision.",

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author = "Masaki Takeguchi and Ayako Hashimoto and Masayuki Shimojo and Kazutaka Mitsuishi and Kazuo Furuya",

year = "2008",

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AU - Takeguchi, Masaki

AU - Hashimoto, Ayako

AU - Shimojo, Masayuki

AU - Mitsuishi, Kazutaka

AU - Furuya, Kazuo

PY - 2008/8/1

Y1 - 2008/8/1

N2 - A stage-scanning system is composed of a specially designed transmission electron microscopy specimen holder equipped with a piezo-driven specimen stage, power supplier and control software. This system enables the specimen to be scanned three-dimensionally, and therefore confocal scanning transmission electron microscopy (STEM) can be performed with a fixed electron-optics configuration. It is demonstrated that stage-scanning confocal STEM images can be obtained with the lateral atomic resolution and the specimen can be moved three-dimensionally with high precision.

AB - A stage-scanning system is composed of a specially designed transmission electron microscopy specimen holder equipped with a piezo-driven specimen stage, power supplier and control software. This system enables the specimen to be scanned three-dimensionally, and therefore confocal scanning transmission electron microscopy (STEM) can be performed with a fixed electron-optics configuration. It is demonstrated that stage-scanning confocal STEM images can be obtained with the lateral atomic resolution and the specimen can be moved three-dimensionally with high precision.

KW - Confocal scanning transmission electron microscopy

KW - Optical sectioning

KW - Piezo actuators

KW - Pinhole

KW - Stage-scanning system

KW - Three-dimensional scanning

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JO - Journal of Electron Microscopy

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Development of a stage-scanning system for high-resolution confocal STEM

Abstract

Keywords

ASJC Scopus subject areas

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