Development of a stage-scanning system for high-resolution confocal STEM

Masaki Takeguchi, Ayako Hashimoto, Masayuki Shimojo, Kazutaka Mitsuishi, Kazuo Furuya

Research output: Contribution to journalArticlepeer-review

50 Citations (Scopus)


A stage-scanning system is composed of a specially designed transmission electron microscopy specimen holder equipped with a piezo-driven specimen stage, power supplier and control software. This system enables the specimen to be scanned three-dimensionally, and therefore confocal scanning transmission electron microscopy (STEM) can be performed with a fixed electron-optics configuration. It is demonstrated that stage-scanning confocal STEM images can be obtained with the lateral atomic resolution and the specimen can be moved three-dimensionally with high precision.

Original languageEnglish
Pages (from-to)123-127
Number of pages5
JournalJournal of Electron Microscopy
Issue number4
Publication statusPublished - 2008 Aug 1
Externally publishedYes


  • Confocal scanning transmission electron microscopy
  • Optical sectioning
  • Piezo actuators
  • Pinhole
  • Stage-scanning system
  • Three-dimensional scanning

ASJC Scopus subject areas

  • Instrumentation


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