@article{dece6efa7f434bf4aed6ba2a9dd3df36,
title = "Development of high-acceleration and ultra-precision linear motor drive machine tool equipped with the anti-vibration system",
keywords = "Anti-vibration system, Pneumatic spindle, Ultra-precision machine tool",
author = "Kazuo Nakamoto and Masahiro Anzai and Shinichi Matsumoto",
year = "2008",
month = jun,
doi = "10.2493/jjspe.74.543",
language = "English",
volume = "74",
pages = "543--546",
journal = "Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering",
issn = "0912-0289",
publisher = "Japan Society for Precision Engineering",
number = "6",
}