Development of high-resolution MFM-tips

Michael R. Koblischka, Astrid N. Müller, Uwe Hartmann, Thomas Sulzbach, Paul M. Dodd

Research output: Contribution to journalConference articlepeer-review


The preparation of high-resolution magnetic force microscopy (MFM) tips using the EBD method for MFM measurements on soft magnetic materials was discussed. Electron beam lithography (EBL) using a scanning electron microscope (SEM) was used to define small particles of the magnetic material at the very end of the tip to achieve maximum lateral resolution. The results using these tips for measurements on GMR read heads were presented.

Original languageEnglish
Pages (from-to)DU03
JournalDigests of the Intermag Conference
Publication statusPublished - 2002 Dec 1
Externally publishedYes
Event2002 IEEE International Magnetics Conference-2002 IEEE INTERMAG - Amsterdam, Netherlands
Duration: 2002 Apr 282002 May 2

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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