Development of high-resolution MFM-tips

Michael Rudolf Koblischka, A. N. Müller, U. Hartmann, T. Sulzback, P. Dodd

Research output: Chapter in Book/Report/Conference proceedingConference contribution


In this contribution, we report on the preparation of high-resolution MFM tips using the EBD-method for MFM measurements on soft magnetic samples. Electron beam lithography (EBL) using a scanning electron microscope (SEM) was used to define small particles of magnetic material at the very end of a commercial scanning microscope tip to achieve maximum lateral resolution with low magnetic moment.

Original languageEnglish
Title of host publicationINTERMAG Europe 2002 - IEEE International Magnetics Conference
EditorsJ. Fidler, B. Hillebrands, C. Ross, D. Weller, L. Folks, E. Hill, M. Vazquez Villalabeitia, J. A. Bain, Jo De Boeck, R. Wood
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)0780373650, 9780780373655
Publication statusPublished - 2002 Jan 1
Externally publishedYes
Event2002 IEEE International Magnetics Conference, INTERMAG Europe 2002 - Amsterdam, Netherlands
Duration: 2002 Apr 282002 May 2


Other2002 IEEE International Magnetics Conference, INTERMAG Europe 2002

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering
  • Surfaces, Coatings and Films


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