TY - GEN
T1 - Development of highly efficient micro energy harvesters with MgHf-codoped AlN piezoelectric films
AU - Nguyen, Hung H.
AU - Van Minh, Le
AU - Oguchi, Hiroyuki
AU - Kuwano, Hiroki
PY - 2018/4/24
Y1 - 2018/4/24
N2 - This paper presents the development of high power-density vibration micro energy harvesters (VEHs) exploiting MgHf-codoped AlN ((MgHf)xAl1-xN) piezoelectric films. The devices provided a significant improvement in performance of micro-energy harvesters. A normalized power density (NPD) of 34.9 mW.g-2.cm-3 was increased 18-fold than that of the best published AlN-based device. The devices in this study consisted of a (MgHf)xAl1-xN/Si cantilever and a W/Si proof-mass. Our piezoelectric films with MgHf dopant of χ = 0, 0.05, and 0.10 were grown successfully on Pt/Ti/SOI substrates by an ion-beam sputtering using an AlN and a MgHf targets in Ar/N2 ambient. The films offered a power-generation figure of merit (FoM) of 22 GPa, which is 3-fold larger than that of AlN. The results confirmed the high potential of (MgHf)xAl1-xN-based VEHs as power sources for wireless sensor networks (WSNs) crucial to realize Internet of Things (IoT).
AB - This paper presents the development of high power-density vibration micro energy harvesters (VEHs) exploiting MgHf-codoped AlN ((MgHf)xAl1-xN) piezoelectric films. The devices provided a significant improvement in performance of micro-energy harvesters. A normalized power density (NPD) of 34.9 mW.g-2.cm-3 was increased 18-fold than that of the best published AlN-based device. The devices in this study consisted of a (MgHf)xAl1-xN/Si cantilever and a W/Si proof-mass. Our piezoelectric films with MgHf dopant of χ = 0, 0.05, and 0.10 were grown successfully on Pt/Ti/SOI substrates by an ion-beam sputtering using an AlN and a MgHf targets in Ar/N2 ambient. The films offered a power-generation figure of merit (FoM) of 22 GPa, which is 3-fold larger than that of AlN. The results confirmed the high potential of (MgHf)xAl1-xN-based VEHs as power sources for wireless sensor networks (WSNs) crucial to realize Internet of Things (IoT).
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U2 - 10.1109/MEMSYS.2018.8346524
DO - 10.1109/MEMSYS.2018.8346524
M3 - Conference contribution
AN - SCOPUS:85047011067
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 222
EP - 225
BT - 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Y2 - 21 January 2018 through 25 January 2018
ER -