Development of stage-scanning system for confocal scanning transmission electron microscopy

Ayako Hashimoto, Masaki Takeguchi, Masayuki Shimojo, Kazutaka Mitsuishi, Miyoko Tanaka, Kazuo Furuya

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)


We developed a stage-scanning system for confocal scanning transmission electron microscopy (confocal STEM), which enables us to perform STEM under a fixed lens configuration without a beam-scanning system. A specimen holder with a piezo-driven stage was modified and controlled by a computer program for stage scanning. The signals of transmitted electrons detected by an STEM detector were displayed on a computer screen and were synchronized with the voltage supplied to the piezoelectric devices used for stage positioning, which consequently produced a, stage-scanning STEM image. Furthermore, we evaluated the stability of the developed stage-scanning STEM system and the resolution of the obtained images. 0.2 nm lattice firings could be observed in Au particles, which indicated that this system could demonstrate atomic-resolution STEM imaging at desired z positions. This is attributed to the small specimen drift, stable stage scanning and the computer program developed for stage axis corrections. Finally, we applied this stage-scanning system to confocal imaging.

Original languageEnglish
Pages (from-to)111-114
Number of pages4
Journale-Journal of Surface Science and Nanotechnology
Publication statusPublished - 2008 Apr 12
Externally publishedYes


  • Confocal imaging
  • Piezo-driven specimen stage
  • Scanning transmission electron microscopy
  • Stage-scanning system

ASJC Scopus subject areas

  • Biotechnology
  • Bioengineering
  • Condensed Matter Physics
  • Mechanics of Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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