| Original language | English |
|---|---|
| Journal | Default journal |
| Publication status | Published - 2004 May 1 |
Direct patterning of nanostructures by electron beam induced deposition with a sub-nanometer probe
K. Furuya, K. Mitsuishi, M. Shimojo, M. Song, M. Tanaka, M. Takeguchi
Research output: Contribution to journal › Article › peer-review