@inproceedings{ff82ae016b0743b6b97150f8b30d40d3,
title = "Effect of Current on Ni Catalyst Layer Used for Current-Enhanced CVD of Multilayer Graphene",
abstract = "Current application was found to enhance the crystallinity of multilayer graphene during CVD using a Ni catalyst layer. However, the reduction of surface roughness has been the issue. The effect of current to the Ni catalyst layer was investigated, and it was found that the current promotes the growth of Ni (111) grains, leading to the enhanced compressive stress. After reaching the stress limit, the Ni microstructure changed again and the stress was relaxed. Such microstructure changes in the Ni film correlated with the surface roughness.",
keywords = "current application, CVD, film stress, grain growth, multilayer graphene, Ni catalyst layer, surface roughness",
author = "Jumpei Tokida and Reno Hasumi and Kazuyoshi Ueno",
note = "Funding Information: This work is supported by JSPS KAKENHI No. JPK04289 and International Research Center for Green Electronics, SIT. Publisher Copyright: {\textcopyright} 2022 IEEE.; 2022 IEEE International Interconnect Technology Conference, IITC 2022 ; Conference date: 27-06-2022 Through 30-06-2022",
year = "2022",
doi = "10.1109/IITC52079.2022.9881311",
language = "English",
series = "2022 IEEE International Interconnect Technology Conference, IITC 2022",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "85--86",
booktitle = "2022 IEEE International Interconnect Technology Conference, IITC 2022",
}