Effect of surface roughening on femtosecond laser-induced ripple structures

Takuro Tomita; Keita Kinoshita; Shigeki Matsuo; Shuichi Hashimoto

doi:10.1063/1.2720709

Effect of surface roughening on femtosecond laser-induced ripple structures

Takuro Tomita, Keita Kinoshita, Shigeki Matsuo, Shuichi Hashimoto

Research output: Contribution to journal › Article › peer-review

125 Citations (Scopus)

Abstract

The effect of surface roughness was studied on the formation of femtosecond laser-induced ripple structures for 4H-SiC. Of the two types of ripple structures, fine and coarse, the threshold fluence for the formation of the fine ripple was remarkably reduced on the surface roughened by intentional rubbing, while the threshold for the formation of the coarse ripple was not affected. The result suggests that the initial surface roughness plays a significant role only for the formation of fine ripples. A brief explanation will be given on the qualitative basis for the specific effect of surface morphology to the fine ripple formation.

Original language	English
Article number	153115
Journal	Applied Physics Letters
Volume	90
Issue number	15
DOIs	https://doi.org/10.1063/1.2720709
Publication status	Published - 2007
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.2720709

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title = "Effect of surface roughening on femtosecond laser-induced ripple structures",

abstract = "The effect of surface roughness was studied on the formation of femtosecond laser-induced ripple structures for 4H-SiC. Of the two types of ripple structures, fine and coarse, the threshold fluence for the formation of the fine ripple was remarkably reduced on the surface roughened by intentional rubbing, while the threshold for the formation of the coarse ripple was not affected. The result suggests that the initial surface roughness plays a significant role only for the formation of fine ripples. A brief explanation will be given on the qualitative basis for the specific effect of surface morphology to the fine ripple formation.",

author = "Takuro Tomita and Keita Kinoshita and Shigeki Matsuo and Shuichi Hashimoto",

note = "Funding Information: The authors thank M. Yamaguchi of Technical Research Institute, Japan Society for The Promotion of Machine Industry for fruitful discussions and T. Okada, H. Kawahara, R. Kumai, and Y. Nakagawa of the University of Tokushima for technical assistance. The authors also acknowledge the financial support by the Japanese Ministry of Education, Culture, Sports, Science and Technology through a Grant-in-Aid for Young Scientists (B) (No. 17760056), and the project research grant by the Faculty of Engineering, The University of Tokushima.",

year = "2007",

doi = "10.1063/1.2720709",

language = "English",

volume = "90",

journal = "Applied Physics Letters",

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publisher = "American Institute of Physics Publising LLC",

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T1 - Effect of surface roughening on femtosecond laser-induced ripple structures

AU - Tomita, Takuro

AU - Kinoshita, Keita

AU - Matsuo, Shigeki

AU - Hashimoto, Shuichi

N1 - Funding Information: The authors thank M. Yamaguchi of Technical Research Institute, Japan Society for The Promotion of Machine Industry for fruitful discussions and T. Okada, H. Kawahara, R. Kumai, and Y. Nakagawa of the University of Tokushima for technical assistance. The authors also acknowledge the financial support by the Japanese Ministry of Education, Culture, Sports, Science and Technology through a Grant-in-Aid for Young Scientists (B) (No. 17760056), and the project research grant by the Faculty of Engineering, The University of Tokushima.

PY - 2007

Y1 - 2007

N2 - The effect of surface roughness was studied on the formation of femtosecond laser-induced ripple structures for 4H-SiC. Of the two types of ripple structures, fine and coarse, the threshold fluence for the formation of the fine ripple was remarkably reduced on the surface roughened by intentional rubbing, while the threshold for the formation of the coarse ripple was not affected. The result suggests that the initial surface roughness plays a significant role only for the formation of fine ripples. A brief explanation will be given on the qualitative basis for the specific effect of surface morphology to the fine ripple formation.

AB - The effect of surface roughness was studied on the formation of femtosecond laser-induced ripple structures for 4H-SiC. Of the two types of ripple structures, fine and coarse, the threshold fluence for the formation of the fine ripple was remarkably reduced on the surface roughened by intentional rubbing, while the threshold for the formation of the coarse ripple was not affected. The result suggests that the initial surface roughness plays a significant role only for the formation of fine ripples. A brief explanation will be given on the qualitative basis for the specific effect of surface morphology to the fine ripple formation.

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Effect of surface roughening on femtosecond laser-induced ripple structures

Abstract

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