Electroforming of Ni mold using high-aspect-ratio PMMA microstructures fabricated by proton beam writing

Yusuke Tanabe, Hiroyuki Nishikawa, Takahiro Satoh, Yasuyuki Ishii, Tomihiro Kamiya, Tohru Watanabe, Atsushi Sekiguchi

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	36th International Conference on Micro & Nano Engineering (MNE),(Genoa, Italy, 19-22 September 2010)
Publication status	Published - 2010 Sept 1

Cite this

@article{4991ddf2361a4218a07255ff3efd2416,

title = "Electroforming of Ni mold using high-aspect-ratio PMMA microstructures fabricated by proton beam writing",

author = "Yusuke Tanabe and Hiroyuki Nishikawa and Takahiro Satoh and Yasuyuki Ishii and Tomihiro Kamiya and Tohru Watanabe and Atsushi Sekiguchi",

year = "2010",

month = sep,

day = "1",

language = "English",

journal = "36th International Conference on Micro & Nano Engineering (MNE),(Genoa, Italy, 19-22 September 2010)",

}

TY - JOUR

T1 - Electroforming of Ni mold using high-aspect-ratio PMMA microstructures fabricated by proton beam writing

AU - Tanabe, Yusuke

AU - Nishikawa, Hiroyuki

AU - Satoh, Takahiro

AU - Ishii, Yasuyuki

AU - Kamiya, Tomihiro

AU - Watanabe, Tohru

AU - Sekiguchi, Atsushi

PY - 2010/9/1

Y1 - 2010/9/1

M3 - Article

JO - 36th International Conference on Micro & Nano Engineering (MNE),(Genoa, Italy, 19-22 September 2010)

JF - 36th International Conference on Micro & Nano Engineering (MNE),(Genoa, Italy, 19-22 September 2010)

ER -