Electron beam induced deposition of position and size controlled structures on the nanometre scale

K. Furuya, K. Mitsuishi, M. Shimojo, M. Song, M. Tanaka, M. Takeguchi

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	239-242
Journal	Springer Proceedings in Physics
Volume	vol. 107
Publication status	Published - 2006 Jan 1

Cite this

@article{402f3b6e09e44bbfbe54f88c9d531dee,

title = "Electron beam induced deposition of position and size controlled structures on the nanometre scale",

author = "K. Furuya and K. Mitsuishi and M. Shimojo and M. Song and M. Tanaka and M. Takeguchi",

year = "2006",

month = jan,

day = "1",

language = "English",

volume = "vol. 107",

pages = "239--242",

journal = "Springer Proceedings in Physics",

}