Electron-beam-induced deposition of position and size controlled structures by an advanced transmission electron microscope

K. Furuya, K. Mitsuishi, M. Shimojo, M. Song, M. Tanaka [Unknown], M. Takeguchi

Research output: Contribution to journal › Article › peer-review

Cite this

@article{5af9a41cbd134b23a467a4523ba695a8,

title = "Electron-beam-induced deposition of position and size controlled structures by an advanced transmission electron microscope",

author = "K. Furuya and K. Mitsuishi and M. Shimojo and M. Song and [Unknown], {M. Tanaka} and M. Takeguchi",

year = "2004",

month = aug,

day = "1",

language = "English",

journal = "Default journal",

}