Electron beam induced depositions of nano-dots by the presence of the partial pressure of precursor

K. Furuya, M. Tanaka, M. Shimojo, K. Mitsuishi

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)540-541
Number of pages2
JournalMicroscopy and Microanalysis
Issue numberSUPPL. 2
Publication statusPublished - 2004
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation

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