Electron induced nanodeposition of tungsten using field emission scanning and transmission electron microscopes

M. Shimojo, K. Mitsuishi, A. Tameike, K. Furuya

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	742-746
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	22
Issue number	2
DOIs	https://doi.org/10.1116/1.1688349
Publication status	Published - 2004
Externally published	Yes

ASJC Scopus subject areas

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