Examination of etching agent and etching mechanism on femotosecond laser microfabrication of channels inside vitreous silica substrates

Satoshi Kiyama, Shigeki Matsuo, Shuichi Hashimoto, Yasushi Morihira

Research output: Contribution to journal › Article › peer-review

187 Citations (Scopus)

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Engineering & Materials Science

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Chemical Compounds