Fabrication and characterization of annular-shaped piezoelectric micromachined ultrasonic transducer mounted with Pb(Zr,Ti)O3-based monocrystalline thin film

Ziyi Liu, Shinya Yoshida, Shuji Tanaka

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds