Fabrication and characterization of GaP photonic crystals for terahertz wave application

Kyosuke Saito, Kei Nozawa, Tadao Tanabe, Yutaka Oyama, Ken Suto, Jun Ichi Nishizawa, Tetsuo Sasaki, Tomoyuki Kimura

Research output: Contribution to journalArticlepeer-review


We have fabricated GaP two-dimensional photonic crystals (PCs) for terahertz (THz) wave generation by a reactive ion etching in Ar/Cl 2 gas chemistries. We performed 75-μm-deep etching of GaP, in which Al 2O 3 layer is applied as a hard mask with its selectivity as high as 125. We demonstrated the THz-wave generation from the fabricated GaP slab waveguide with the PC structure as a cladding layer under a collinear phase-matched difference frequency generation. In the frequency dependence of THz output power for the PC slab waveguide is seen at around 1.1 THz. From the in-plane transmission spectrum of THz-wave, we confirmed that the THz output characteristics had relation with the photonic structure for THz wave.

Original languageEnglish
Pages (from-to)2340-2342
Number of pages3
JournalMaterials Transactions
Issue number9
Publication statusPublished - 2007 Sept
Externally publishedYes


  • Collinear phase matching
  • GaP
  • Optical waveguide
  • Phonon-polariton
  • Photonic crystal
  • Terahertz-wave

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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