Fabrication and characterization of ultra-water-repellent alumina-silica composite films

Takahiro Ishizaki, Nagahiro Saito, Yasushi Inoue, Makoto Bekke, Osamu Takai

Research output: Contribution to journalArticlepeer-review

34 Citations (Scopus)


Ultra-water-repellent (UWR) films were prepared by microwave plasma-enhanced chemical vapour deposition using trimethylmethoxysilane and aluminium (III) diisopropoxide ethylacetoacetate (ADE) as raw materials. The film was mainly composed of silica and alumina and was apparently transparent. The film thickness was approximately 500 nm. The sample surface was treated with an organosilane in order to introduce hydrophobic groups. The hydrophobic modification led to a water contact angle of more than 150°, whose value corresponds to the UWR surface. The hardness of film with an optimized Al content was significantly improved compared with that without Al. The maximum hardness was 1.71 GPa. In consequence, we successfully prepared an UWR film in the silica-alumina system.

Original languageEnglish
Article number014
Pages (from-to)192-197
Number of pages6
JournalJournal of Physics D: Applied Physics
Issue number1
Publication statusPublished - 2007 Jan 7
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films


Dive into the research topics of 'Fabrication and characterization of ultra-water-repellent alumina-silica composite films'. Together they form a unique fingerprint.

Cite this