Fabrication of BIT thick films patterned by proton beam writing

In this study, we fabricated thick films with polyvinylpyrrolidone (PVP) added to bismuth titanate (Bi₄Ti₃O₁₂) to form a lead-free ferroelectric material. We examined the direct patterning of these materials by using proton-beam irradiation. When 50% PVP was added to the organic source solution, the c-axis orientation was promoted and cracks were suppressed due to stress relaxation. In addition, a dot and an arbitrary-shape micro-pattern were formed on bismuth-titanate thick film by micromachining using a proton beam.